Sputtering

Sputtering targets for optical disc media

Various targets used to form each functional layer of optical disc media.

Product Lineup

Product name Oxide Target Recording Film Target
Material Oxygen-deficient niobium pentoxide (Nb2O5)
target		 Oxygen-deficient titanium oxide (TiO2)
target		 -
Specific resistance (Ω・cm) <0.01 *DC sputtering is possible <0.1 *DC sputtering is possible -
Density ratio (%) 99≦ 99≦ 90≦
Size (mm) φ149/φ200 φ149/φ200 φ200

Product information

Optical Semiconductor

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