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Sputtering
Sputtering targets for Optical devices
Optical film targets that achieve high productivity and high reliability.
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- Product name
- Single crystal silicon (Si) target
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- Features
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- Special bonding technology reduces warping of the target, making it less likely to crack.
- A high bonding rate with the backing plate ensures stable cooling efficiency.
Specifications
| No. | Single crystal silicon (Si) target |
|---|---|
| structure | Single crystal |
| Specific resistance (Ω・cm) | ≦0.02 |
| Size (mm) | Various shapes available |
Formation of SiO2 films such as car side mirrors and hydrophilic films
caution
Note on the characteristic data given - Data on the characteristics of the products described in this page based on the results of evaluations carried out by the company. This does not guarantee that the characteristics of the product conform with your usage environment. Before use, review the usage conditions based on evaluation data obtained from the equipment and substrates actually used.
Product information
Optical Semiconductor
